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Computer Controlled Ion Beam Sputter Deposition Of Superconducting Oxide Films
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Book Synopsis Computer-Controlled Ion Beam Sputter-Deposition of Superconducting Oxide Films by :
Download or read book Computer-Controlled Ion Beam Sputter-Deposition of Superconducting Oxide Films written by and published by . This book was released on 1989 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt: The goals of this project are: 1) the development of a new method for the fabrication of superconducting oxide thin films, viz computer controlled ion beam sputter deposition; and 2) the fabrication of YBa2Cu3O(7-delta) thin films and devices using this method. In the early stage of the project it was demonstrated that the use of complex multicomponent sputter targets (such as ceramic YBa2Cu3O7-delta) present significant problems for compositional control. The new computer-controlled ion beam sputter deposition system was developed. The key features include: 1) a rotatable target holder assembly, which serves to position elemental targets under the ion beam in a rapid sequence, 2) a primary ion beam to produce a sputtered flux from the targets, 3) a secondary oxygen beam (ionic, atomic, or reactive oxygen (ozone)) to oxygenate the film and lower the required deposition temperature, 4) complete computer interfacing to provide real time feedback on the thickness of the depositing species and control of the above items. In terms of the superconductor device objectives, the system is designed to allow for low temperature deposition for integrated devices, compositional control and flexibility, and for scaling to a commercial system. The capability of the system for controlled sequential deposition of layered structures is fundamental for the production of heterostructures and sandwich junctions (superconductor-insulator-superconductor and superconductor-normal-superconductor). This is demanding due to the short coherence lengths in the oxide superconductors.
Book Synopsis A Novel Computer-controlled Single Ion Beam Multi-target Sputter Deposition System for Y-Ba-Cu-O High TC Superconducting Thin Films by : Ying-Li Liu
Download or read book A Novel Computer-controlled Single Ion Beam Multi-target Sputter Deposition System for Y-Ba-Cu-O High TC Superconducting Thin Films written by Ying-Li Liu and published by . This book was released on 1992 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Sputter Deposition for Multi-component Thin Films by :
Download or read book Sputter Deposition for Multi-component Thin Films written by and published by . This book was released on 1990 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Ion beam sputter-induced deposition using a single ion beam and a multicomponent target is capable of reproducibly producing thin films of arbitrary composition, including those which are close to stoichiometry. Using a quartz crystal deposition monitor and a computer controlled, well-focused ion beam, this sputter-deposition approach is capable of producing metal oxide superconductors and semiconductors of the superlattice type such as GaAs-AlGaAs as well as layered metal/oxide/semiconductor/superconductor structures. By programming the dwell time for each target according to the known sputtering yield and desired layer thickness for each material, it is possible to deposit composite films from a well-controlled sub-monolayer up to thicknesses determined only by the available deposition time. In one embodiment, an ion beam is sequentially directed via a set of X-Y electrostatic deflection plates onto three or more different element or compound targets which are constituents of the desired film. In another embodiment, the ion beam is directed through an aperture in the deposition plate and is displaced under computer control to provide a high degree of control over the deposited layer. In yet another embodiment, a single fixed ion beam is directed onto a plurality of sputter targets in a sequential manner where the targets are each moved in alignment with the beam under computer control in forming a multilayer thin film. This controlled sputter-deposition approach may also be used with laser and electron beams.
Book Synopsis Scientific and Technical Aerospace Reports by :
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1992-11 with total page 652 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Reactive Ion Beam Sputter Deposition of High Temperature Superconducting Cuprate Oxide Thin Films by : Clifford Norman Soble
Download or read book Reactive Ion Beam Sputter Deposition of High Temperature Superconducting Cuprate Oxide Thin Films written by Clifford Norman Soble and published by . This book was released on 1992 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Computer Simulation of Scattered Ion and Sputtered Species Effects in Ion Beam Sputter-deposition of High Temperature Superconducting Thin Films by :
Download or read book Computer Simulation of Scattered Ion and Sputtered Species Effects in Ion Beam Sputter-deposition of High Temperature Superconducting Thin Films written by and published by . This book was released on 1992 with total page 10 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ion beam sputter-deposition is a technique currently used by many groups to produce single and multicomponent thin films. This technique provides several advantages over other deposition methods, which include the capability for yielding higher film density, accurate stoichiometry control, and smooth surfaces. However, the relatively high kinetic energies associated with ion beam sputtering also lead to difficulties if the process is not properly controlled. Computer simulations have been performed to determine net deposition rates, as well as the secondary erosion, lattice damage, and gas implantation in the films, associated with primary ions scattered from elemental Y, Ba and Cu targets used to produce high temperature superconducting Y-Ba-Cu-O films. The simulations were performed using the TRIM code for different ion masses and kinetic energies, and different deposition geometries. Results are presented for primary beams of Ar, Kr and Xe+ incident on Ba and Cu targets at 0° and 45° with respect to the surface normal, with the substrate positioned at 0° and 45°. The calculations indicate that the target composition, mass and kinetic energy of the primary beam, angle of incidence on the target, and position and orientation of the substrate affect the film damage and trapped primary beam gas by up to 5 orders of magnitude.
Book Synopsis Technical Reports Awareness Circular : TRAC. by :
Download or read book Technical Reports Awareness Circular : TRAC. written by and published by . This book was released on 1989-12 with total page 502 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Surface Processing and Laser Assisted Chemistry by : E. Fogarassy
Download or read book Surface Processing and Laser Assisted Chemistry written by E. Fogarassy and published by Elsevier. This book was released on 1990-12-01 with total page 495 pages. Available in PDF, EPUB and Kindle. Book excerpt: The papers in this volume cover all aspects of laser assisted surface processing ranging from the preparation of high-Tc superconducting layer structures to industrial laser applications for device fabrication. The topics presented give recent results in organometallic chemistry and laser photochemistry, and novel surface characterization techniques. The ability to control the surface morphology by digital deposition and etching shows one of the future directions for exciting applications of laser surface processing, some of which may apply UV and VUV excitation. The understanding of elementary proceses is essential for the design of novel deposition methods, with diamond CVD being an outstanding example. The high quality of these contributions once again demonstrates that the E-MRS is an efficient forum for interaction between research workers and industry.
Download or read book Energy Research Abstracts written by and published by . This book was released on 1990 with total page 852 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Beam-Solid Interactions:: Volume 157 by : James A. Knapp
Download or read book Beam-Solid Interactions:: Volume 157 written by James A. Knapp and published by Mrs Proceedings. This book was released on 1990-07-13 with total page 912 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Book Synopsis Computer Simulation of Scattered Ion and Sputtered Species Effects in Ion Beam Sputter-deposition of High Temperature Superconducting Thin Films by :
Download or read book Computer Simulation of Scattered Ion and Sputtered Species Effects in Ion Beam Sputter-deposition of High Temperature Superconducting Thin Films written by and published by . This book was released on 1992 with total page 10 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Thin Film Processing:Hi-Tc Superconductors.AVS Series 3 by : James M. E. Harper
Download or read book Thin Film Processing:Hi-Tc Superconductors.AVS Series 3 written by James M. E. Harper and published by American Institute of Physics. This book was released on 1988 with total page 498 pages. Available in PDF, EPUB and Kindle. Book excerpt: Addresses the importance of these surfaces in establishing the pairing mechanisms responsible for superconductivity. Discussions include evaporation, sputtering, laser ablation, the effects of substrates and surface and interface chemistry on superconducting films, and the characterization of these
Book Synopsis American Ceramic Society Bulletin by :
Download or read book American Ceramic Society Bulletin written by and published by . This book was released on 1990 with total page 1264 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices by : O. Auciello
Download or read book Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices written by O. Auciello and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 625 pages. Available in PDF, EPUB and Kindle. Book excerpt: The synthesis of multicomponent/multilayered superconducting, conducting, semiconducting and insulating thin films has become the subject of an intensive, worldwide, interdisciplinary research effort. The development of deposition-characterization techniques and the science and technology related to the synthesis of these films are critical for the successful evolution of this interdisciplinary field of research and the implementation of the new materials in a whole new generation of advanced microdevices. This book contains the lectures and contributed papers on various scientific and technological aspects of multicomponent and multilayered thin films presented at a NATO/ASI. Compared to other recent books on thin films, the distinctive character of this book is the interdisciplinary treatment of the various fields of research related to the different thin film materials mentioned above. The wide range of topics discussed in this book include vacuum-deposition techniques, synthesis-processing, characterization, and devices of multicomponent/multilayered oxide high temperature superconducting, ferroelectric, electro-optic, optical, metallic, silicide, and compound semiconductor thin films. The book presents an unusual intedisciplinary exchange of ideas between researchers with cross-disciplinary backgrounds and it will be useful to established investigators as well as postdoctoral and graduate students.
Book Synopsis Studies on Ion Scattering and Sputtering Processes Relevant to Ion Beam Sputter Deposition of Multicomponent Thin Films by :
Download or read book Studies on Ion Scattering and Sputtering Processes Relevant to Ion Beam Sputter Deposition of Multicomponent Thin Films written by and published by . This book was released on 1989 with total page 5 pages. Available in PDF, EPUB and Kindle. Book excerpt: Results from computer simulation and experiments on ion scattering and sputtering processes in ion beam sputter deposition of high Tc superconducting and ferroelectric thin films are presented. It is demonstrated that scattering of neutralized ions from the targets can result in undesirable erosion of, and inert gas incorporation in, the growing films, depending on the ion/target atom ass ratio and ion beam angle of incidence/target/substrate geometry. The studies indicate that sputtering Kr or Xe ions is preferable to the most commonly used Ar+ ions, since the undesirable phenomena mentioned above are minimized for the first two ions. These results are used to determine optimum sputter deposition geometry and ion beam parameters for growing multicomponent oxide thin films by ion beam sputter-deposition. 10 refs., 5 figs.
Book Synopsis Ceramic Thin and Thick Films by : Basavaraj V. Hiremath
Download or read book Ceramic Thin and Thick Films written by Basavaraj V. Hiremath and published by . This book was released on 1990 with total page 486 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Controlled Ion Beam Sputter-deposition of W/Cu/W Layered Films for Microelectronics Applications by : Orlando Auciello
Download or read book Controlled Ion Beam Sputter-deposition of W/Cu/W Layered Films for Microelectronics Applications written by Orlando Auciello and published by . This book was released on 1990 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
