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Arrays Of High Performance Ultra High Frequency Aluminum Nitride Trampoline Resonators With Gold Aluminum Electrodes
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Book Synopsis Arrays of High-performance Ultra-high-frequency Aluminum Nitride Trampoline Resonators with Gold-aluminum Electrodes by : Annie Kaplan
Download or read book Arrays of High-performance Ultra-high-frequency Aluminum Nitride Trampoline Resonators with Gold-aluminum Electrodes written by Annie Kaplan and published by . This book was released on 2005 with total page 200 pages. Available in PDF, EPUB and Kindle. Book excerpt: He value of the Q-factors is almost unchanged. When the electrodes are considered in the analysis, it is concluded that electrodes a quarter-wavelength thick maximize the Q-factor and that added thin metallic sublayers return better performance values. Finally, simulations contrasting air environment with vacuum indicate that damping due to air is insignificant.
Book Synopsis High-Q AlN Contour Mode Resonators with Unattached, Voltage-Actuated Electrodes by : Robert A. Schneider
Download or read book High-Q AlN Contour Mode Resonators with Unattached, Voltage-Actuated Electrodes written by Robert A. Schneider and published by . This book was released on 2015 with total page 219 pages. Available in PDF, EPUB and Kindle. Book excerpt: High-Q narrowband filters at ultra-high frequencies hold promise for reducing noise and suppressing interferers in wireless transceivers, yet research efforts confront a daunting challenge. So far, no existing resonator technology can provide the simultaneous high-Q, high electromechanical coupling (k_{eff}^2), frequency tunability, low motional resistance (R_x), stopband rejection, self-switchability, frequency accuracy, and power handling desired to select individual channels or small portions of a band over a wide RF range. Indeed, each technology provides only a subset of the desired properties. Recently introduced "capacitive-piezoelectric" resonators, i.e., piezoelectric resonators with non-contacting transduction electrodes, known for achieving very good Q's, have recently emerged (in the early 2010's) as a contender among existing technologies to address the needs of RF narrowband selection. Several reports of such devices, made from aluminum nitride (AlN), have demonstrated improved Q's over attached electrode counterparts at frequencies up to 1.2 GHz, albeit with reduced transduction efficiency due to the added capacitive gaps. Fabrication challenges, while still allowing for a glimpse of the promise of this technology, have, until now, hindered attempts at more complex devices than just simple resonators with improved Q's. This thesis project demonstrates several key improvements to capacitive-piezo technology, which, taken together, further bolster its case for deployment for frequency control applications. First, new fabrication techniques improve yields, reliability, and performance. Second, design modifications now allow k_{eff}^2's on par even with attached-electrode contour-mode devices, while most importantly, achieving unprecedented Q-factors for AlN. Third, a new electrode-collapsed based resonance-quenching capability allows ON/OFF switching of resonators and filters, such as would be useful for a bank of parallel filters. Fourth, an integrated voltage-controlled gap-reduction-based frequency tuning mechanism permits wide frequency tuning of devices and thus much improved frequency accuracy. Gap actuation also allows for the decoupling of filters in the OFF state. And fifth, switchable and tunable capacitive-piezo narrow-band filters are demonstrated for the first time. This thesis is divided into eight parts. In the first chapter, context is provided to demonstrate the purpose of this work. RF channel selection is introduced and a survey of currently available technology is presented. The second chapter explains key operating principles for MEMS resonators so a novice reader can be better equipped to fully understand the design choices made in later chapters. Chapter 3, on high-performance capacitive-piezo disk resonators, introduces the fundamental device of this thesis, providing examples of performance and design optimization, experimental results, simulation methods, and modeling. Chapter 4 introduces capacitive-piezoelectric disk arrays as a method to increase the area and thereby reduce the motional resistance of the unit disk resonator. Chapter 5 discusses voltage controlled gap actuation of the capacitive piezoelectric transducer's top electrode, which enables voltage controlled frequency tuning and on/off switching. Chapter 6 takes a thorough look at the fabrication technology needed to make capacitive-piezo devices, including lessons learned on how to avoid certain pitfalls. Chapter 7, on filters, contains both theory and measurement results of filters. Chapter 8 concludes the thesis by summarizing the key achievements of Chapters 3 through 7, highlighting key areas needing further development, and discussing implications of this technology for the future.
Book Synopsis Super High Frequency Width Extensional Aluminum Nitride (AlN) MEMS Resonators by :
Download or read book Super High Frequency Width Extensional Aluminum Nitride (AlN) MEMS Resonators written by and published by . This book was released on 2009 with total page 4 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Temperature-Compensated and High-Q Piezoelectric Aluminum Nitride Lamb Wave Resonators for Timing and Frequency Control Applications by : Chih-Ming Lin
Download or read book Temperature-Compensated and High-Q Piezoelectric Aluminum Nitride Lamb Wave Resonators for Timing and Frequency Control Applications written by Chih-Ming Lin and published by . This book was released on 2013 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt: The explosive development of wireless and mobile communication systems has lead to rapid technology innovation in component performance, complementary metal-oxide semiconductor (CMOS) compatible fabrication techniques, and system improvement to satisfy requirements for faster signal processing, cost efficiency, chip miniaturization, and low power consumption. The demands for the high-performance communication systems whose fundamentals are precise timing and frequency control have driven the current research interests to develop advanced reference oscillators and radio frequency (RF) bandpass filters. In turn a promising microelectromechanical systems (MEMS) resonator technology is required to achieve the ultimate goal. That is, micromechanical vibrating resonators with high quality factor (Q) and good frequency-temperature stability at high series resonance frequency (fs) are the required fundamental components for a high-performance wireless communication system. Recently, Lamb wave mode propagating in piezoelectric thin plates has attracted great attention for designs of the electroacoustic resonators since it combines the advantages of bulk acoustic wave (BAW) and surface acoustic wave (SAW): high phase velocity and multiple frequency excitation by an interdigital transducer (IDT). More specifically, the Lamb wave resonator (LWR) based on an aluminum nitride (AlN) thin film has attracted many attentions because it can offer the high resonance frequency, small temperature-induced frequency drift, low motional resistance, and CMOS compatibility. The lowest-order symmetric (S0) Lamb wave mode propagation in the AlN thin plate is particularly preferred because it exhibits a phase velocity close to 10,000 m/s, a low dispersive phase velocity characteristic, and a moderate electromechanical coupling coefficient. However, the uncompensated AlN LWR shows a first-order temperature coefficient of frequency (TCF) of approximately -25 ppm/C. This level of the temperature stability is unsuitable for any timing application. In addition, the Q of the AlN LWR is degraded to several hundred while the IDT finger width is downscaled to a nanometer scale to raise the resonance frequency up to a few GHz. This dissertation presents comprehensive analytical and experimental results on a new class of temperature-compensated and high-Q piezoelectric AlN LWRs. The temperature compensation of the AlN LWR using the S0 Lamb wave mode is achieved by adding a layer of silicon dioxide (SiO2) with an appropriate thickness ratio to the AlN thin film, and the AlN/SiO2 LWRs can achieve a low first-order TCF at room temperature. Based on the multilayer plate composed of a 1-um-thick AlN film and a 0.83-um-thick SiO2 layer, a temperature-compensated LWR operating at a series resonance frequency of 711 MHz exhibits a zero first-order TCF and a small second-order TCF of -21.5 ppb/C^2 at its turnover temperature, 18.05 C. The temperature dependence of fractional frequency variation is less than 250 parts per million (ppm) over a wide temperature range from -55 to 125 C. In addition to the temperature compensation at room temperature, the thermal compensation of the AlN LWRs is experimentally demonstrated at high temperatures. By varying the normalized AlN and SiO2 thicknesses to the wavelength, the turnover temperature can be designed at high temperatures and the AlN LWRs are temperature-compensated at 214, 430, and 542 C, respectively. The temperature-compensated AlN/SiO2 LWRs are promising for a lot of applications including thermally stable oscillators, bandpass filters, and sensors at room temperature as well as high temperatures. The influences of the bottom electrode upon the characteristics of the LWRs utilizing the S0 Lamb wave mode in the AlN thin plate are theoretically and experimentally studied. Employment of a floating bottom electrode for the LWR reduces the static capacitance in the AlN membrane and accordingly enhances the effective coupling coefficient. The floating bottom electrode simultaneously offers a large coupling coefficient and a simple fabrication process than the grounded bottom electrode but the transduction efficiency is not sacrificed. In contrast to those with the bottom electrode, an AlN LWR with no bottom electrode shows a high Q of around 3,000 since it gets rid of the electrical loss in the metal-to-resonator interface. In addition, it exhibits better power handling capacity than those with the bottom electrode since less thermal nonlinearity induced by the self-heating exists in the resonators. In order to boost the Q, a new class of the AlN LWRs using suspended convex edges is introduced in this dissertation for the first time. The suspended convex edges can efficiently reflect the Lamb waves back towards the transducer as well as confine the mechanical energy in the resonant body. Accordingly the mechanical energy dissipation through the support tethers is significantly minimized and the Q can be markedly enhanced. More specifically, the measured frequency response of a 491.8-MHz LWR with suspended biconvex edges yields a Q of 3,280 which represents a 2.6x enhancement in Q over a 517.9-MHz LWR based on the same AlN thin plate but with the suspended flat edges. The suspended convex edges can efficiently confine mechanical energy in the LWR and reduce the energy dissipation through the support tethers without increasing the motional impedance of the resonator. In addition, the radius of curvature of the suspended convex edges and the AlN thickness normalized to the wavelength can be further optimized to simultaneously obtain high Q, low motional impedance, and large effective coupling coefficient. To further enhance the Q of the LWR, a composite plate including an AlN thin film and an epitaxial cubic silicon carbide (3C-SiC) layer is introduced to enable high-Q and high-frequency micromechanical resonators utilizing high-order Lamb wave modes. The use of the epitaxial 3C-SiC layer is attractive as SiC crystals have been theoretically proven to have an exceptionally large fs and Q product due to its low acoustic loss characteristic at microwave frequencies. In addition, AlN and 3C-SiC have well-matched mechanical and electrical properties, making them a suitable material stack for the electroacoustic resonators. The epitaxial 3C-SiC layer not only provides the micromechanical resonators with a low acoustic loss layer to boost their Q but also enhances the electromechanical coupling coefficients of some high-order Lamb waves in the AlN/3C-SiC composite plate. A micromachined electroacoustic resonator utilizing the third quasi-symmetric (QS3) Lamb wave mode in the AlN/3C-SiC composite plate exhibits a Q of 5,510 at 2.92 GHz, resulting in the highest fs and Q product, 1.61x10^13 Hz, among suspended piezoelectric thin film resonators to date.
Book Synopsis Understanding Smart Sensors by : Randy Frank
Download or read book Understanding Smart Sensors written by Randy Frank and published by Artech House Publishers. This book was released on 1996 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Two of the most important trends in sensor development in recent years have been advances in micromachined sensing elements of all kinds, and the increase in intelligence applied at the sensor level. This book addresses both, and provides a good overview of current technology". -- I&CS
Book Synopsis Cavity Optomechanics by : Markus Aspelmeyer
Download or read book Cavity Optomechanics written by Markus Aspelmeyer and published by Springer. This book was released on 2014-07-05 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: During the last few years cavity-optomechanics has emerged as a new field of research. This highly interdisciplinary field studies the interaction between micro and nano mechanical systems and light. Possible applications range from novel high-bandwidth mechanical sensing devices through the generation of squeezed optical or mechanical states to even tests of quantum theory itself. This is one of the first books in this relatively young field. It is aimed at scientists, engineers and students who want to obtain a concise introduction to the state of the art in the field of cavity optomechanics. It is valuable to researchers in nano science, quantum optics, quantum information, gravitational wave detection and other cutting edge fields. Possible applications include biological sensing, frequency comb applications, silicon photonics etc. The technical content will be accessible to those who have familiarity with basic undergraduate physics.
Book Synopsis Piezoelectric Sensorics by : Gustav Gautschi
Download or read book Piezoelectric Sensorics written by Gustav Gautschi and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 271 pages. Available in PDF, EPUB and Kindle. Book excerpt: For the first time, this book covers the entire field of piezoelectric sensors for mechanical measurands. It gives extensive practical advice along with an overview of the most important piezoelectric materials and their properties, plus consistent terminology for describing sensors.
Book Synopsis Fundamentals of Nanomechanical Resonators by : Silvan Schmid
Download or read book Fundamentals of Nanomechanical Resonators written by Silvan Schmid and published by Springer. This book was released on 2016-06-21 with total page 183 pages. Available in PDF, EPUB and Kindle. Book excerpt: This authoritative book introduces and summarizes the latest models and skills required to design and fabricate nanomechanical resonators with a focus on nanomechanical sensing. It also establishes the theoretical foundation for courses on micro and nanomechanics. This book takes an applied approach to nanomechanics, providing a complete set of mechanical models, including strings and membrane resonators. Also discussed are quality factors, noise issues, transduction techniques, nanomechanical sensing, fabrication techniques, and applications for all common nanomechanical resonator types. It is an ideal book for students and researchers working with micro and nanomechanical resonators.
Book Synopsis Teach Students How to Learn by : Saundra Yancy McGuire
Download or read book Teach Students How to Learn written by Saundra Yancy McGuire and published by Taylor & Francis. This book was released on 2023-07-03 with total page 182 pages. Available in PDF, EPUB and Kindle. Book excerpt: Co-published with and Miriam, a freshman Calculus student at Louisiana State University, made 37.5% on her first exam but 83% and 93% on the next two. Matt, a first year General Chemistry student at the University of Utah, scored 65% and 55% on his first two exams and 95% on his third—These are representative of thousands of students who decisively improved their grades by acting on the advice described in this book.What is preventing your students from performing according to expectations? Saundra McGuire offers a simple but profound answer: If you teach students how to learn and give them simple, straightforward strategies to use, they can significantly increase their learning and performance. For over a decade Saundra McGuire has been acclaimed for her presentations and workshops on metacognition and student learning because the tools and strategies she shares have enabled faculty to facilitate dramatic improvements in student learning and success. This book encapsulates the model and ideas she has developed in the past fifteen years, ideas that are being adopted by an increasing number of faculty with considerable effect.The methods she proposes do not require restructuring courses or an inordinate amount of time to teach. They can often be accomplished in a single session, transforming students from memorizers and regurgitators to students who begin to think critically and take responsibility for their own learning. Saundra McGuire takes the reader sequentially through the ideas and strategies that students need to understand and implement. First, she demonstrates how introducing students to metacognition and Bloom’s Taxonomy reveals to them the importance of understanding how they learn and provides the lens through which they can view learning activities and measure their intellectual growth. Next, she presents a specific study system that can quickly empower students to maximize their learning. Then, she addresses the importance of dealing with emotion, attitudes, and motivation by suggesting ways to change students’ mindsets about ability and by providing a range of strategies to boost motivation and learning; finally, she offers guidance to faculty on partnering with campus learning centers.She pays particular attention to academically unprepared students, noting that the strategies she offers for this particular population are equally beneficial for all students. While stressing that there are many ways to teach effectively, and that readers can be flexible in picking and choosing among the strategies she presents, Saundra McGuire offers the reader a step-by-step process for delivering the key messages of the book to students in as little as 50 minutes. Free online supplements provide three slide sets and a sample video lecture.This book is written primarily for faculty but will be equally useful for TAs, tutors, and learning center professionals. For readers with no background in education or cognitive psychology, the book avoids jargon and esoteric theory.
Book Synopsis Sensors and Microsystems by : Piero Malcovati
Download or read book Sensors and Microsystems written by Piero Malcovati and published by Springer Science & Business Media. This book was released on 2010-03-14 with total page 435 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and Microsystems contains a selection of papers presented at the 14th Italian conference on sensors and microsystems. It provides a unique perspective on the research and development of sensors, microsystems and related technologies in Italy. The scientific values of the papers also offers an invaluable source to analyists intending to survey the Italian situation about sensors and microsystems. In an interdisciplinary approachm many aspects of the disciplines are covered, ranging from materials science, chemistry, applied physics, electronic engineering and biotechnologies. Further details of the conference and its full program at the website http://www.microelectronicsevents.com/AISEM
Book Synopsis Magnetic Measurement Techniques for Materials Characterization by : Victorino Franco
Download or read book Magnetic Measurement Techniques for Materials Characterization written by Victorino Franco and published by Springer Nature. This book was released on 2021-09-28 with total page 814 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses the most commonly used techniques for characterizing magnetic material properties and their applications. It provides a comprehensive and easily digestible collection and review of magnetic measurement techniques. It also examines the underlying operating principles and techniques of magnetic measurements, and presents current examples where such measurements and properties are relevant. Given the pervasive nature of magnetic materials in everyday life, this book is a vital resource for both professionals and students wishing to deepen their understanding of the subject.
Book Synopsis Green Nanotechnology by : Oleg Figovsky
Download or read book Green Nanotechnology written by Oleg Figovsky and published by CRC Press. This book was released on 2017-09-01 with total page 449 pages. Available in PDF, EPUB and Kindle. Book excerpt: Green nanotechnology has two goals: producing nanomaterials and products without harming the environment or human health, and producing nanoproducts that provide solutions to environmental problems. It uses existing principles of green chemistry and green engineering to make nanomaterials and nanoproducts without toxic ingredients, at low temperatures using less energy and renewable inputs wherever possible, and using lifecycle thinking in all design and engineering stages. The production and process aspects of green nanotechnology involve both making nanomaterials in a more environmentally benign fashion and using nanomaterials to make current chemical processes more environmentally acceptable. This book contains information about advanced nanomaterials that can be produced without harming the environment or human health. This encompasses the production of nanomaterials without environmental toxicity, at room temperature and with the use of renewable energy sources. The book contains the descriptions and results of theoretical and experimental researches in the field of environment friendly nanotechnology carried out over the past decade by the scientific team of company Polymate Ltd.-International Nanotechnology Center (Israel) under leadership of Prof. O. Figovsky. Developments of the Company have been used in industry and agriculture and protected by more than 25 patents of USA, Germany and Russia.
Book Synopsis Electrostatically Actuated All-polymer Microbeam Resonators by : Silvan Schmid
Download or read book Electrostatically Actuated All-polymer Microbeam Resonators written by Silvan Schmid and published by . This book was released on 2009 with total page 227 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis New Trends in Applied Harmonic Analysis by : Akram Aldroubi
Download or read book New Trends in Applied Harmonic Analysis written by Akram Aldroubi and published by Birkhäuser. This book was released on 2016-04-29 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume is a selection of written notes corresponding to courses taught at the CIMPA School: "New Trends in Applied Harmonic Analysis: Sparse Representations, Compressed Sensing and Multifractal Analysis". New interactions between harmonic analysis and signal and image processing have seen striking development in the last 10 years, and several technological deadlocks have been solved through the resolution of deep theoretical problems in harmonic analysis. New Trends in Applied Harmonic Analysis focuses on two particularly active areas that are representative of such advances: multifractal analysis, and sparse representation and compressed sensing. The contributions are written by leaders in these areas, and cover both theoretical aspects and applications. This work should prove useful not only to PhD students and postdocs in mathematics and signal and image processing, but also to researchers working in related topics.
Book Synopsis Treatise on Acoustics by : E.F.F. Chladni
Download or read book Treatise on Acoustics written by E.F.F. Chladni and published by Springer. This book was released on 2015-10-29 with total page 247 pages. Available in PDF, EPUB and Kindle. Book excerpt: E.F.F. Chladni’s experiments and observations with sound and vibrations profoundly influenced the development of the field of Acoustics. The famous Chladni diagrams along with other observations are contained in Die Akustik, published in German in 1802 and Traité d’Acoustique, a greatly expanded version, published in French in 1809. This is the first comprehensive translation of the expanded French version of Traité d’Acoustique, using the 1802 German publication for reference and clarification. The translation was undertaken by Robert T. Beyer, PhD (1920-2008), noted acoustician, Professor of Physics at Brown University, and Gold Medal recipient of the Acoustical Society of America. Along with many other projects completed over the course of his career, Dr. Beyer translated Von Neumann’s seminal work, Mathematical Foundations of Quantum Mechanics from the original German, spent 30 years translating Russian physics treatises and journals, served as editor of the English translation of the Soviet Journal of Experimental and Theoretical Physics, and also authored Sounds of our Times: Two Hundred Years of Acoustics.
Book Synopsis Trauma Plating Systems by : Amirhossein Goharian
Download or read book Trauma Plating Systems written by Amirhossein Goharian and published by Elsevier. This book was released on 2017-03-15 with total page 421 pages. Available in PDF, EPUB and Kindle. Book excerpt: Trauma Plating Systems is the first reference and systematic book in the topic of trauma plating system in view of biomechanical, material, biological, and clinical aspects. The effects of these aspects on effectiveness of trauma plating fixation are deeply reviewed, discussed, and challenged from which promising evaluation and development concepts are explored. This book is divided into five sections: Section I covers general concepts of biomechanical, material, biological, and clinical aspects. Then it provides fundamentals of trauma plating systems, principles of biomechanical evaluation methods, and biomechanics of plating fixation in Section II. Section III reviews current metallic materials with their advantages and disadvantages in plating fixation of bone fractures and new promising materials with their potential benefits to enhance the effectiveness of plating fixation. Section IV represents currently concerned biomechanical-clinical challenges of plating fixation for various bone fractures, and Section V presents current and new development concepts of this type of trauma implants. This book as an accessible and easy usable textbook for various disciplines of audiences who are dealing with trauma plating system and fixation such as orthopedic surgeons, trauma implant manufacturers, biomechanical researchers, biomaterial researchers, and all biomedical or medical students and residents in different levels of education. Author has been diligent in both engineering and research environments in terms of research, testing, analysis, validation, verification, clinical studies, and technical writing. His main interest and effort is to integrate biomechanical, material, biological, and clinical requirements of orthopedic implants for creation of novel design conception in this industry. He has developed the website http://orthoimplant-development.com/ for further communication in development of orthopedic implants. Smooth writing style for effective following, fast reading, and easy accessibility of the content Detailed and insight reviews, discussions, and new ideas in evaluation methods and design conception Disclosing of a novel conceptual plating system (Advance Healing Fixation System—AHealFS) with advanced biomechanical and clinical benefits in various stages of healing period potential to bring an interesting science breakthrough in fixation of bone fractures
Book Synopsis Encyclopedia of Continuum Mechanics by : Holm Altenbach
Download or read book Encyclopedia of Continuum Mechanics written by Holm Altenbach and published by Springer. This book was released on 2020-01-04 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Encyclopedia covers the entire science of continuum mechanics including the mechanics of materials and fluids. The encyclopedia comprises mathematical definitions for continuum mechanical modeling, fundamental physical concepts, mechanical modeling methodology, numerical approaches and many fundamental applications. The modelling and analytical techniques are powerful tools in mechanical civil and areospsace engineering, plus in related fields of plasticity, viscoelasticity and rheology. Tensor-based and reference-frame-independent, continuum mechanics has recently found applications in geophysics and materials.
