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Author : Fei Hu
Publisher :
ISBN 13 :
Total Pages : 212 pages
Book Rating : 4.:/5 (52 download)
Download or read book An Implementation of Proximity Effect Correction for Grayscale E-beam Lithography written by Fei Hu and published by . This book was released on 2002 with total page 212 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Joseph Charles Jacob
Publisher :
ISBN 13 :
Total Pages : 190 pages
Book Rating : 4.E/5 ( download)
Download or read book Pyramid-a Hierarchical, Rule-based Scheme for Proximity Effect Correction in Electron-beam Lithography written by Joseph Charles Jacob and published by . This book was released on 1992 with total page 190 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Ashfaq A. Munshi
Publisher :
ISBN 13 :
Total Pages : 110 pages
Book Rating : 4.:/5 (232 download)
Download or read book Proximity Effect Correction in Electron Beam Lithography written by Ashfaq A. Munshi and published by . This book was released on 1982 with total page 110 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Yang Xiang
Publisher : Springer
ISBN 13 : 3642330789
Total Pages : 581 pages
Book Rating : 4.6/5 (423 download)
Download or read book Algorithms and Architectures for Parallel Processing written by Yang Xiang and published by Springer. This book was released on 2012-09-04 with total page 581 pages. Available in PDF, EPUB and Kindle. Book excerpt: The two volume set LNCS 7439 and 7440 comprises the proceedings of the 12th International Conference on Algorithms and Architectures for Parallel Processing, ICA3PP 2012, as well as some workshop papers of the CDCN 2012 workshop which was held in conjunction with this conference. The 40 regular paper and 26 short papers included in these proceedings were carefully reviewed and selected from 156 submissions. The CDCN workshop attracted a total of 19 original submissions, 8 of which are included in part II of these proceedings. The papers cover many dimensions of parallel algorithms and architectures, encompassing fundamental theoretical approaches, practical experimental results, and commercial components and systems.
Author : J. M. Pavkovich
Publisher :
ISBN 13 :
Total Pages : 5 pages
Book Rating : 4.:/5 (227 download)
Download or read book Proximity Effect Correction in Variably Shaped Electron-Beam Lithography written by J. M. Pavkovich and published by . This book was released on 1985 with total page 5 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proximity effect in electron-beam lithography is studied with an emphasis on physical understanding. Computer simulation is used to explore correction schemes which specifically include the resist behavior and yet are theoretically manageable in formulating the pattern correction for mathematical analysis. Both energy density part way through the resist and relative importance of background on critical edge are investigated. It is shown that one-third of the resist thickness from the substrate appears to be where the process parameters should be characterized, and that the total effective deposited energy at the nominal edge must be reduced as the background contribution increases. A mathematical model and design graphs are developed so that the impact of the background on the edge control is directly related to fundamental physics through the Monte Carlo calculation. The nominal edge is used as the critical aspect to be controlled and the constraint of constant bias can be applied. (Author).
Author : 藍崇源
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (13 download)
Download or read book Proximity Effect Correction for Multiple Electron Beam Direct Write Systems written by 藍崇源 and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : 黃靖軒
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (18 download)
Download or read book High Throughput Proximity Effect Correction for Multiple Electron Beam Direct Write Systems written by 黃靖軒 and published by . This book was released on 2018 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Peter J. Hesketh
Publisher : Springer Science & Business Media
ISBN 13 : 038746283X
Total Pages : 300 pages
Book Rating : 4.3/5 (874 download)
Download or read book BioNanoFluidic MEMS written by Peter J. Hesketh and published by Springer Science & Business Media. This book was released on 2007-11-15 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book explains biosensor development fundamentals. It also initiates awareness in engineers and scientists who would like to develop and implement novel biosensors for agriculture, biomedicine, homeland security, environmental needs, and disease identification. In addition, the book introduces and lays the basic foundation for design, fabrication, testing, and implementation of next generation biosensors through hands-on learning.
Author : HL. Berkowitz
Publisher :
ISBN 13 :
Total Pages : 19 pages
Book Rating : 4.:/5 (125 download)
Download or read book Edge-Controlled, Self-Consistent Proximity Effect Corrections written by HL. Berkowitz and published by . This book was released on 1984 with total page 19 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new method for correcting electron-beam lithography pattern data for proximity effects is presented. The method calculates the average dose received by each partition exterior edge to be equal to the critical dose necessary for proper exposure. This method minimizes the number of partitioned rectangles required for acceptable lithography, thus greatly reducing CPU time. Electron-beam dose averages are not only determined for critical edges where exposure conditions are stringent, but also for the rest of the partitioned edges where tolerances are more relaxed. Both simulated and experimental results will be presented.
Author : Melissa Ann Iovino
Publisher :
ISBN 13 :
Total Pages : 168 pages
Book Rating : 4.:/5 (319 download)
Download or read book Proximity Correction for Electron Beam Lithography Utilizing CAPROX written by Melissa Ann Iovino and published by . This book was released on 1994 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Eugenio Iannone
Publisher : CRC Press
ISBN 13 : 1466560738
Total Pages : 1178 pages
Book Rating : 4.4/5 (665 download)
Download or read book Labs on Chip written by Eugenio Iannone and published by CRC Press. This book was released on 2018-09-03 with total page 1178 pages. Available in PDF, EPUB and Kindle. Book excerpt: Labs on Chip: Principles, Design and Technology provides a complete reference for the complex field of labs on chip in biotechnology. Merging three main areas— fluid dynamics, monolithic micro- and nanotechnology, and out-of-equilibrium biochemistry—this text integrates coverage of technology issues with strong theoretical explanations of design techniques. Analyzing each subject from basic principles to relevant applications, this book: Describes the biochemical elements required to work on labs on chip Discusses fabrication, microfluidic, and electronic and optical detection techniques Addresses planar technologies, polymer microfabrication, and process scalability to huge volumes Presents a global view of current lab-on-chip research and development Devotes an entire chapter to labs on chip for genetics Summarizing in one source the different technical competencies required, Labs on Chip: Principles, Design and Technology offers valuable guidance for the lab-on-chip design decision-making process, while exploring essential elements of labs on chip useful both to the professional who wants to approach a new field and to the specialist who wants to gain a broader perspective.
Author : Abdel Salam Hamdy Makhlouf
Publisher : Elsevier
ISBN 13 : 0857094904
Total Pages : 449 pages
Book Rating : 4.8/5 (57 download)
Download or read book Nanocoatings and Ultra-Thin Films written by Abdel Salam Hamdy Makhlouf and published by Elsevier. This book was released on 2011-09-14 with total page 449 pages. Available in PDF, EPUB and Kindle. Book excerpt: Coatings are used for a wide range of applications, from anti-fogging coatings for glass through to corrosion control in the aerospace and automotive industries. Nanocoatings and ultra-thin films provides an up-to-date review of the fundamentals, processes of deposition, characterisation and applications of nanocoatings. Part one covers technologies used in the creation and analysis of thin films, including chapters on current and advanced coating technologies in industry, nanostructured thin films from amphiphilic molecules, chemical and physical vapour deposition methods and methods for analysing nanocoatings and ultra-thin films. Part two focuses on the applications of nanocoatings and ultra-thin films, with chapters covering topics such as nanocoatings for architectural glass, packaging applications, conventional and smart nanocoatings for corrosion protection in aerospace engineering and ultra-thin membranes for sensor applications. With its distinguished editors and international team of contributors, Nanocoatings and ultra-thin films is an essential reference for professional engineers in the glazing, consctruction, electronics and transport industries, as well as all those with an academic research interest in the field. Provides an up-to-date review of the fundamentals, processes of deposition, characterisation and applications of nanocoatings Focuses on the applications of nanocoatings and ultra-thin films, covering topics such as nanocoatings for architectural glass, packaging applications and ultra-thin membranes for sensor applications Includes chapters on current and advanced coating technologies in industry, nanostructured thin films from amphiphilic molecules, chemical and physical vapour deposition methods and methods for analysing nanocoatings and ultra-thin films
Author : Zheng Cui
Publisher : Springer Science & Business Media
ISBN 13 : 0387755772
Total Pages : 350 pages
Book Rating : 4.3/5 (877 download)
Download or read book Nanofabrication written by Zheng Cui and published by Springer Science & Business Media. This book was released on 2009-01-01 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides the reader with the most up-to-date information and development in the Nanofabrication area. It presents a one-stop description at the introduction level on most of the technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The book serves as a practical guide and first hand reference for those working in nanostructure fabrication.
Author : Xiaolin Wang
Publisher : kassel university press GmbH
ISBN 13 : 3862191133
Total Pages : 176 pages
Book Rating : 4.8/5 (621 download)
Download or read book High Resolution 3D Nanoimprint Technology written by Xiaolin Wang and published by kassel university press GmbH. This book was released on 2011 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Vidosav D. Majstorovic
Publisher : Springer
ISBN 13 : 3030181774
Total Pages : 330 pages
Book Rating : 4.0/5 (31 download)
Download or read book Proceedings of the 12th International Conference on Measurement and Quality Control - Cyber Physical Issue written by Vidosav D. Majstorovic and published by Springer. This book was released on 2019-05-03 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gathers the proceedings of the 12th International Conference on Measurement and Quality Control – Cyber Physical Issues (IMEKO TC 14 2019), held in Belgrade, Serbia, on 4–7 June 2019. The event marks the latest in a series of high-level conferences that bring together experts from academia and industry to exchange knowledge, ideas, experiences, research findings, and information in the field of measurement of geometrical quantities. The book addresses a wide range of topics, including: 3D measurement of GPS characteristics, measurement of gears and threads, measurement of roughness, micro- and nano-metrology, laser metrology for precision measurements, cyber physical metrology, optical measurement techniques, industrial computed tomography, multisensor techniques, intelligent measurement systems, evaluating measurement uncertainty, dimensional management in industry, product quality assurance methods, and big data analytics. By providing updates on key issues and highlighting recent advances in measurement and quality control, the book supports the transfer of vital knowledge to the next generation of academics and practitioners.
Author : Sorab K. Ghandhi
Publisher : John Wiley & Sons
ISBN 13 : 0471580058
Total Pages : 870 pages
Book Rating : 4.4/5 (715 download)
Download or read book VLSI Fabrication Principles written by Sorab K. Ghandhi and published by John Wiley & Sons. This book was released on 1994-03-31 with total page 870 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fully updated with the latest technologies, this edition covers thefundamental principles underlying fabrication processes forsemiconductor devices along with integrated circuits made fromsilicon and gallium arsenide. Stresses fabrication criteria forsuch circuits as CMOS, bipolar, MOS, FET, etc. These diversetechnologies are introduced separately and then consolidated intocomplete circuits. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment.
Author : Chris A. Mack
Publisher : Finle Technologies Incorporated
ISBN 13 : 9780965092203
Total Pages : 175 pages
Book Rating : 4.0/5 (922 download)
Download or read book Inside Prolith written by Chris A. Mack and published by Finle Technologies Incorporated. This book was released on 1997-01-01 with total page 175 pages. Available in PDF, EPUB and Kindle. Book excerpt:
